Lithium Tantlate(LiTaO3) wafer
Diameter: 2 inch , 3 inch , 4 inch , 5 inch - 7 inch
In accordance with the provisions of standard production
Thickness: 500±15 µm, 1000±20 µm
Orientation: X-Axis Y-Axis Z-Axis ± 0.1°
Y-axis 36° Rotated, Y-axis 42° Rotated
TTV ≤10 µm ≤15 µm ≤20 µm ≤30 µm
BOW ≤10 µm ≤15 µm ≤20 µm ≤30 µm
Front Surface: 10/5
Back Surface: Fine ground (#240/#180); Polished (10/5)
Chamfer: < 0.3 mm, 45°±5°
